Veeco Wyko NT9800 Optical Profiling System 3D Non-Contact Surface Analyzer

Description

Veeco Wyko NT9800 Optical Profiling System 3D Non-Contact Surface Analyzer
IXL2.5
Model 831-277-5 Date: 08/26/2008
Laser Drive 121T-1700-4.9-TTL-2
TMC 63-31907-01
Condition
Photos represent the exact item, please refer the photos.
Manufacturer Description
The Wyko NT9800 Optical Profiler provides an outstanding platform for rapid measurement of step heights, surface roughness, and a host of other topographical characteristics. As the ninth generation in Veeco’s industry-leading NT Series product line, the NT9800 delivers non-contact, high-resolution 3D measurements from 0.1 nanometer up to 10 millimeters, with sub-nanometer resolution.
The gauge-capable NT9800 assists pre-production process and device development, and provides a stable, robust platform for the production ramp into a high-volume manufacturing environment. An internal laser reference, unique to Veeco, provides self-calibration to minimize dependence on step standards, and compensates for system drift from environmental or mechanical instability. Add to this a robust and thoroughly proven metrology core, a comprehensive suite of automation tools, over a decade of high-volume production support, and an easy-to-use interface, and you have the ideal metrology solution for demanding research and production applications.
Industry-leading Wyko Vision® software provides over 200 built-in analysis algorithms, as well as automated measurement sequences (recipes), data logging, and pass-fail criteria for real-time process feedback and SPC. Optional analysis packages include Film Analysis for transparent film measurements down to 100 nanometers. A SureVision template facilitates easy setup of robust automation, and a MATLAB® interface gives engineers the ability to write and integrate custom analysis algorithms.
Specifications
Measurement Capability Non-contact, three-dimensional, surface, film thickness, tribology
Objectives 1.5X, 2.5X, 5X, 10X, 20X, 50X for magnifications from 0.75X to 100X;
Long working distance objectives available;
Optional motorized turret;
Optional through transmissive media objective
Field of View Multipliers 0.55X, 0.75X, 1X, 1.5X, 2X;
Auto-sensing motorized selector,
discreet zoom
Measurement Array Maximum array 640 x 480, high-speed,
non-interlaced;
Optional 1392 x 1040 camera
Light Source Long-lifetime green and white LEDs
Stages Automated 100mm Z axis std.;
200mm XY auto stage std.;
Optional 300mm XY stage;
Optional 200mm R-theta stage
Optical Assembly Integrated computer-controlled illuminator;
Closed-loop laser-referenced vertical scanner
Computer System Latest Dell with 24/7 support line;
Dual 17in. flat panel monitor std.;
Optional “small footprint” config. with
17in. flat panel monitor on Ergotron®
adjustable arm
Software Vision running under Microsoft®
Windows XP® Professional;
Production mode, built-in data basing with
pass/fail for any parameter;
Optional Stitching, MATLAB®
/TCPIP,
Film Analysis, Optical Analysis and SureVison
Vertical Measurement Range 0.1nm to 10mm std.
Vertical Resolution1 <0.1nm
RMS Repeatability2 0.01nm
Vertical Scan Speed User selectable up to 80μm/sec
Lateral Spatial Sampling 0.1 to 13.2μm (<–160nm with high-resolution camera)
Optical Resolution 0.55μm min. (based on Sparrow Criteria at 600nm)
Field of View 8.45mm to 0.05mm (10.8mm x 8.1mm max. with high-resolution camera);
Optional stitching
Reflectivity <1 to 100%
Step Height 0.6% accuracy; <0.1% at 1σ repeatability
Footprint 1245mm W x 775mm D x 1549mm H
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Shipping Policies
We take great care in packaging every item to ensure safe & quality shipping.
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Return Policies
Items must be returned in the original manufacturer's packaging. We strongly recommend you keep your packaging for at least the first 30 days after purchase.
We offer a 30 day return policy on all items. (unless stated otherwise in the listing).
Video games must be returned unopened. If the item is defective, it can be returned within 15 days with a receipt and the original packaging.
Defective items may only be exchanged for the same title.
All returns must be in original condition and must include the original packaging and content intact.
Returns must be packed in proper packaging to avoid damage to the item or its original packaging.
For any return requests please contact us to receive a RMA number and return instructions.
10% - 20% restocking fee may apply.
Please allow 3-5 business days after we receive your package to process your return.
Any returns that violate this return policy will not be accepted and will be sent back at the customer's expense.
The following electronics items must be returned within 15 days of receipt:
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